Autor or authors: D.M. Zayachuk, Y.D. Zayachuk, Cs. Buga, V.E. Slynko, A. Csík

Publication title: Near-non-preferential sputtering of multicomponent solids as an effective way for production of dense cone shape arrays on a sputtered surface.

Place of publication: Elsevier

DOI:  10.1016/j.vacuum.2021.110058

Published: 12 January 2021